| 摘要 |
PROBLEM TO BE SOLVED: To provide a telecentric lens system and an image measuring device capable of coping with various-use observation. SOLUTION: The lens system is equipped with a front side lens group G1, a rear side lens group G2 arranged so that its front side focus may be aligned with the rear side focus of the lens group G1, and a diaphragm mechanism 31 arranged at a position where the rear side focus of the lens group G1 is aligned with the front side focus of the lens group G2. The mechanism 31 is provided with a numerical aperture changing mechanism for changing numerical aperture, so that the lens system can cope with various uses from observation depending on the long depth of focus to observation depending on high resolution by changing the numerical aperture. COPYRIGHT: (C)2003,JPO
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