METHOD AND APPARATUS FOR MEASURING LOCATION AND AMOUNT OF OSCILLATION OF ULTRASONIC PROBE

摘要

PROBLEM TO BE SOLVED: To measure the relative location (or the amount of movement) of an ultrasonic probe and the amount of oscillation of the probe without in any contact with a test object. SOLUTION: The method for measuring the location and amount of oscillation of the ultrasonic probe is constituted by providing at least a pair of optical noncontact in-plane displacement sensors 2a and 2b at a predetermined interval L for the ultrasonic probe 1, determining a movement reference location of the probe 1 in a surface of the test object 3, recording the locations of movement of the sensors 2a and 2b by XY rectangular coordinates, and computing the location and amount of oscillation of the probe 1 as functions of the coordinate locations of the sensors 2a and 2b. COPYRIGHT: (C)2003,JPO