| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic apparatus which can illuminate the end face segment of an object to be measured with adequate brightness and adequate contrast, and can above all exactly measure the contour shape in the end face segment of the object to be measured. SOLUTION: The microscopic apparatus has a viewing and measuring optical system which is disposed to face the surface segment 13a to be measured of the object 13 to be measured and views and measures the image of the object 13, a plurality of light emitting illumination light sources 19 which are held at an annular holding member 16 enclosing the object to be measured from the circumference, is arranged on the circumference around an optical axis O of the viewing and measuring optical system and directly illuminates the object 13 from a direction approximately orthogonal with the optical axis O and an orbicular zone-shaped reflective surface 26 which is formed to an orbicular zone shape on the top surface side of the member 16 and reflects a portion of illumination light P2 heading upward of the light sources 19 toward the downwardly existing surface segment 13a. COPYRIGHT: (C)2003,JPO
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