| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electric field emission element and its manufacturing method. <P>SOLUTION: The electric field emission element comprises a substrate 111, a transparent cathode layer 112 which is deposited on the substrate 111, an insulation layer 115 which is formed on the cathode layer and has a well 118 exposing the part of the cathode layer 112 at the bottom, a gate electrode 116 which is formed on the insulation layer 115 and has an opening 118' corresponding to the well 118, a light-blocking resistance layer 120 which is formed to surround the surface of the gate electrode 116 and the inner walls of the opening and the well 118, and a carbon nanotube field emitting source 113 which is positioned on the exposed cathode layer 112. By removing an alignment error between the gate electrode 116 and the cathode layer 112 and preventing the residue during development of carbon nanotube paste from remaining, current leakage between electrodes, short circuit or diode emission or the like can be prevented, thereby providing electric field emission element where the electric field emission performance is improved. <P>COPYRIGHT: (C)2003,JPO</p> |
