| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of further improving corrosion resistance without impairing performance. SOLUTION: A pressure receiving surface of a diaphragm 19 is provided with a protective layer 17 constituted by laminating a plurality of fluororesin layers 171A to 171D. Among the fluororesin layers 171A to 171D, a melting point of the mutual adjacent layers is different. The other layer does not melt and flow at a melting point of one layer of the adjacent layers. A laminated layer of the fluororesin layers 171A to 171D is adhered by melting press-fitting. A ring-shaped seal member 16 is housed in the outer peripheral edge of a holding part 151, and a groove 154 is formed. The holding part 151 and the protective layer 17 are joined by this seal member 16 to seal a pressure receiving chamber 18 arranged in the holding part 151. COPYRIGHT: (C)2003,JPO
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