| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mover for a surface acoustic wave actuator capable of improving a contact area largely influencing a driving performance and the number of projections per area, improving durability, and being easily manufactured, and to provide a surface acoustic wave actuator using the same. <P>SOLUTION: On the contact surface of a mover where the mover contacts a stator, a film 13 made of a material having a hardness higher than that of a base material 12 is formed on the material 12 having a plurality of columnar projections thereon, thereby forming the projections by the material 12 and the film 13. Abrasion can be reduced and an absorption phenomenon can be solved by a decrease in contact stress by an increase in radius of curvature of the corner part of each projection part caused by film deposition and the characteristics of the film material, it can focus on improvement of projection density of the contact surface with respect to the base material. <P>COPYRIGHT: (C)2003,JPO |
