| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyer type high frequency heating equipment in which supplied high-frequency power can be compensated for deterioration and failure of a magnetron, and occurrence of heating unevenness can be suppressed. SOLUTION: The high frequency heating equipment is constituted so that stabilization of high frequency supply power and suppression of heating unevenness can be aimed at, and by grasping a deterioration situation of a magnetron from a signal level, an advance report can be made, since the magnetron can be made to carry out predetermined time operation at predetermined timing, even if deterioration by aging arises in each magnetron, by carrying out feed- back of signal voltage which detects an oscillation situation of the magnetron 10. Moreover, even when the magnetron 10 is breaking down accidentally, reliability of the conveyer type high-frequency heating equipment as a production facility can be extremely raised by enabling continuous operation by compensating the high frequency supply power for the other magnetron in a corresponding heating chamber 1 or the heating chamber other than the corresponding heating chamber 1, and by informing these states. COPYRIGHT: (C)2003,JPO
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