| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of force-feeding a liquid material that can obtain the liquid material not including dissolved gas. <P>SOLUTION: The liquid material L is injected into bellows tanks 2, 3 by force-feed gas g<SB>1</SB>from a liquid material storage tank 1 storing the liquid material L, and dissolved gas dissolved in the injected liquid material L is removed in the bellows tanks 2, 3. The interior of liquid material force-feeding bellows 5, 6 provided in the bellows tanks 2, 3 is pressurized with force-feed gas g<SB>2</SB>to expand the bellows 5, 6, and the liquid material L is forced out of the bellows tanks 2, 3 in the state of not contacting the force-feed gas g<SB>2</SB>. <P>COPYRIGHT: (C)2003,JPO</p> |
