发明名称 METHOD FOR MANUFACTURING SHADOW MASK AND APPARATUS FOR COATING ETCHING-RESISTANT LAYER FOR MANUFACTURING SHADOW MASK
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for coating an etching-resistant layer for manufacturing a shadow mask in which the life of a gravure roll is prolonged. SOLUTION: The gravure roll 16 is formed of a ceramic material 18 of chromium oxide of 1000 kg/mm<SP>2</SP>or higher in hardness and 5% or less in porosity around a metal roll 17 by sputtering. A carved section 19 having spiral grooves filled with a coating solution 22 for an etching-resistant layer is formed on the periphery of the ceramic material 18 by laser processing. The coating solution 22 is coated on a belt-like metal sheet 12 by speedily rotating the gravure roll 16 oppositely to the running direction of the metal sheet 12. The wear of the gravure roll 16 is reduced due to the surface hardness of the ceramic material 18 of 1000 kg/mm<SP>2</SP>or higher and the chipping thereof is prevented due to the porosity of 5% or less. Since the carved section 19 of the ceramic material 18 is carved by laser processing, the damage to the metal sheet 12 is small, resulting in the long life of the gravure roll 16 itself. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003234066(A) 申请公布日期 2003.08.22
申请号 JP20020031353 申请日期 2002.02.07
申请人 TOSHIBA CORP 发明人 NIKAIDO MASARU;OKAWA TAKESHI;KUMAMOTO KENJI
分类号 C23F1/00;C23F1/08;H01J9/14;(IPC1-7):H01J9/14 主分类号 C23F1/00
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