| 摘要 |
PROBLEM TO BE SOLVED: To provide a catadioptric projection optical system using a luminous flux separation optical system smaller in size than the conventional polarizing beam splitter, securing a long optical path leading to an image surface from a concave reflecting mirror, realizing the facilitation of the adjustment of the optical system and made excellent in the imaging performance. SOLUTION: Luminous flux from an object surface 1 forms a first intermediate image 7 through a dioptric lens group G<SB>1</SB>, the luminous flux from the image 7 passes through the polarizing beam splitter 8 and forms a second intermediate image 10 in the beam splitter 8 by a positive catadioptric lens group G<SB>2</SB>including the concave reflecting mirror M<SB>1</SB>, then the luminous flux from the image 10 is reflected by the beam splitter 8 and forms a third intermediate image on the image surface 5 through a dioptric lens group G<SB>3</SB>. COPYRIGHT: (C)2003,JPO
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