| 摘要 |
PROBLEM TO BE SOLVED: To provide assembly parts capable of assembling and dismantling easily without contaminating vacuum atmosphere and clean room environment. SOLUTION: Since a lubricant D of low vapor pressure (fluorine polymer with the functional group - fluorine oil mixture membrane, etc.), intervenes in a male screw section 30a of a bolt 30 arranged within a process room P where is maintained to a lower atmosphere than atmospheric pressure and tightens the parts each other, the vaporization of lubricant D from the bolt 30 is restrained and then the occurrence of outgassing and generation of dust is restrained, even in the case that the assembly parts (31, 32) are placed in vacuum atmosphere for example. As a result contamination of vacuum atmosphere environment is restrained. On the other hand, scuffing, etc., at tightening is restrained by applying the lubricant D to a frictional face for example of the bolt 30 and assembling/dismantling can be done easily, thus enabling the reuse of the dismantled part 32 as well. COPYRIGHT: (C)2003,JPO
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