| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply unit that can detect an abnormality when an offset occurs in a component for composing the closed loop system of high- frequency and DC power supply unit for a semiconductor manufacturing apparatus, and to provide a semiconductor manufacturing apparatus using the power supply unit and a manufacturing method for a semiconductor wafer. SOLUTION: The power supply unit receives an output value setting signal for setting strength in output and an output on/off-command for setting the output-on/off of the output for outputting. In the power supply unit, when an output detection signal corresponding to a value where the strength of the output is detected exceeds a specific threshold the output on/off-command is turned off, no output is made even if the output on/off-command is set to an on-state. COPYRIGHT: (C)2003,JPO
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