| 摘要 |
PROBLEM TO BE SOLVED: To introduce vent gas into a load lock chamber in a short period and without the flying-up of particles. SOLUTION: A gas introduction mechanism comprises an internal cylinder having opening parts in two directions, an outer shell installed outside via a space between the internal cylinder, a gas feed entrance installed in the tangent direction of the external shell and a filter installed inside the internal cylinder. Gas fed from the gas feed entrance is moved spirally in the space between the internal cylinder and the external cylinder and introduced from the opening in one direction of the internal cylinder to the opening in the other direction of the internal cylinder via the filter. COPYRIGHT: (C)2003,JPO |
