| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide antireflective coating compositions usefully employed in combination with an overcoated photoresist layer to manufacture integrated circuits. <P>SOLUTION: In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. <P>COPYRIGHT: (C)2003,JPO |
