发明名称 PUSH-TYPE SCHEDULING FOR SEMICONDUCTOR FABRICATION
摘要 Control for a production line that queues work-in-process (WIP) prior to a re-entrant bottleneck processing node, such as a photolithography device in a semi-conductor fabrication line. For each WIP, a determination is made as to whether a cleared trajectory is available through all processing nodes subsequent to the bottleneck processing node and back to the re-entrant node or to exit of the production line. If a cleared trajectory is available, the subsequent processing nodes are reserved for the WIP. The WIP is then injected into the process flow, with the result that secondary bottlenecks at downstream processing nodes are largely avoided because the nodes have been pre-reserved. If a cleared trajectory for more than one WIP is available, selection of one WIP for injection into the workflow can be made based on a queuing or priority based selection process.
申请公布号 US2003158618(A1) 申请公布日期 2003.08.21
申请号 US20000514864 申请日期 2000.02.28
申请人 BROWNING RAYMOND 发明人 BROWNING RAYMOND
分类号 H01L21/02;G05B19/418;(IPC1-7):G06F19/00 主分类号 H01L21/02
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