发明名称 |
Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff |
摘要 |
A method for avoiding irregular shutoff of production equipment, includes: measuring regularly time-series data of characteristics of a rotary machine used in the production equipment running for the production; obtaining first failure diagnosis data subjecting the time-series data to a first real-time analysis; obtaining second failure diagnosis data subjecting the first failure diagnosis data to a second real-time analysis; predicting a status of the production equipment several minutes later using the second failure diagnosis data; and shutting off during a production process if the result of the prediction determines that the production equipment will shut off irregularly, and switching to a purge sequence for conducting a gas purge of the production equipment. |
申请公布号 |
US2003158705(A1) |
申请公布日期 |
2003.08.21 |
申请号 |
US20020228110 |
申请日期 |
2002.08.27 |
申请人 |
ISHII KEN;NAKAO TAKASHI;USHIKU YUKIHIRO;SAMATA SHUICHI |
发明人 |
ISHII KEN;NAKAO TAKASHI;USHIKU YUKIHIRO;SAMATA SHUICHI |
分类号 |
F04B49/10;C23C16/52;F04B51/00;G05B9/02;G05B23/02;H01L21/31;(IPC1-7):G06F11/30;G06F15/00;G21C17/00 |
主分类号 |
F04B49/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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