发明名称 Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
摘要 A method for avoiding irregular shutoff of production equipment, includes: measuring regularly time-series data of characteristics of a rotary machine used in the production equipment running for the production; obtaining first failure diagnosis data subjecting the time-series data to a first real-time analysis; obtaining second failure diagnosis data subjecting the first failure diagnosis data to a second real-time analysis; predicting a status of the production equipment several minutes later using the second failure diagnosis data; and shutting off during a production process if the result of the prediction determines that the production equipment will shut off irregularly, and switching to a purge sequence for conducting a gas purge of the production equipment.
申请公布号 US2003158705(A1) 申请公布日期 2003.08.21
申请号 US20020228110 申请日期 2002.08.27
申请人 ISHII KEN;NAKAO TAKASHI;USHIKU YUKIHIRO;SAMATA SHUICHI 发明人 ISHII KEN;NAKAO TAKASHI;USHIKU YUKIHIRO;SAMATA SHUICHI
分类号 F04B49/10;C23C16/52;F04B51/00;G05B9/02;G05B23/02;H01L21/31;(IPC1-7):G06F11/30;G06F15/00;G21C17/00 主分类号 F04B49/10
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