| 摘要 |
The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (14). Thereby, the column comprises a charged particle source (2) for providing a beam of charged particles (10); a lens system for guiding the beam of charged particles (10) from the source (2) onto the specimen (14); and a housing (40) which, during operation, is set on beam boost potential.
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