发明名称 LANTHANIDE SERIES LAYERED SUPERLATTICE MATERIALS FOR INTEGRATED CIRCUIT APPLICATIONS
摘要 An integrated circuit (40) includes a layered superlattice material (57) including one or more of the elements cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium. These elements may either be A-site elements or superlattice generator elements in the layered superlattice material. In one embodiment, one or more of these elements substitute for bismuth in a bismuth layered material. They also are preferably used in combination with one or more of the following elements: strontium, calcium, barium, bismuth, cadmium, lead, titanium, tantalum, hafnium, tungsten, niobium, zirconium, bismuth, scandium, yttrium, lanthanum, antimony, chromium, thallium, oxygen, chlorine, and fluorine. Some of these materials are ferroelectrics that crystallize at relatively low temperatures. Others are high dielectric constant materials that do not degrade or break down over long periods of use.
申请公布号 WO03049172(B1) 申请公布日期 2003.08.21
申请号 WO2002US29325 申请日期 2002.09.17
申请人 SYMETRIX CORPORATION 发明人 PAZ DE ARAUJO, CARLOS, A.;MCMILLAN, LARRY, D.;SOLAYAPPAN, NARAYAN
分类号 C23C16/40;C23C16/44;C23C16/448;C23C16/455;C23C16/48;C23C16/52;C23C18/12;C23C18/14;C30B7/00;H01L21/02;H01L21/314;H01L21/316;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108;H01L27/115 主分类号 C23C16/40
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