A vibration reducing system includes a position control dive (65) and a vibration control drive (45). At least one position sensor (60) is used to provide feedback signals which are in turn unses to provide control signals fore both the position control drive (65) and the vibration control drive (45).
申请公布号
WO03069733(A1)
申请公布日期
2003.08.21
申请号
WO2003US01332
申请日期
2003.01.15
申请人
CYMER, INC.;JACQUES, ROBERT, N.;WARKENTIN, DAVID, J.
