发明名称 Rotation rate sensor
摘要 A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements (100, 200) take place in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
申请公布号 US2003154788(A1) 申请公布日期 2003.08.21
申请号 US20030258336 申请日期 2003.03.19
申请人 WILLIG RAINER;THOMAE ANDREAS;KUHLMANN BURKHARD;HAUER JOERG;GOMEZ UDO-MARTIN;GOETZ SIEGBERT;DOERING CHRISTIAN;FEHRENBACH MICHAEL;BAUER WOLFAM;BISCHOF UDO;NEUL REINHARD;FUNK KARSTEN;LUTZ MARKUS;WUCHER GERHARD;FRANZ JOCHEN 发明人 WILLIG RAINER;THOMAE ANDREAS;KUHLMANN BURKHARD;HAUER JOERG;GOMEZ UDO-MARTIN;GOETZ SIEGBERT;DOERING CHRISTIAN;FEHRENBACH MICHAEL;BAUER WOLFAM;BISCHOF UDO;NEUL REINHARD;FUNK KARSTEN;LUTZ MARKUS;WUCHER GERHARD;FRANZ JOCHEN
分类号 G01C19/56;(IPC1-7):G01P15/14 主分类号 G01C19/56
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