INDUCTION HEATING COIL

摘要

An induction heating coil 21 provided with a gas injection opening communicating with the outside and a plurality of gas supply openings at specified positions of a gas channel 23 formed internally, wherein at least one gas supply opening is provided, in the inner circumferential surface thereof, with screw grooves 51, 52. The gas supply openings are opened in the side of a coil face constituting a planar induction electric field. A specific threaded member 55 is screwed into the screw grooves 51, 52.