Non-volatile semiconductor memory device and manufacturing method therefor

摘要

A non-volatile semiconductor memory device of the present invention is provided with a semiconductor substrate having a main surface, an ONO film (a laminated film of an oxide film, a nitride film and an oxide film) formed on the main surface and having a charge storage part, a pair of buried diffusion bit lines formed in the semiconductor substrate located on both sides of the ONO film, oxide films deposited on the main surface so as to cover the buried diffusion bit lines, and a transfer gate electrode formed on the ONO film.