SPUTTERING TARGET CONTAINING ZINC SULFIDE AS MAJOR COMPONENT, OPTICAL RECORDING MEDIUM ON WHICH PHASE CHANGE OPTICAL DISK PROTECTIVE FILM CONTAINING ZINC SULFIDE AS MAJOR COMPONENT IS FORMED BY USING THE TARGET, AND METHOD FOR MANUFACTURING THE SPUTTERING TARGET

摘要

A sputtering target in which the index of refraction of a film characterized by containing zinc oxide as a major component and a conductive oxide can be adjusted to a value from 2.0 to 2.6 and an optical medium on which a phase change optical disk protective film containing zinc sulfide as a major component is formed by using the target. The sputtering target containing zinc sulfide as a major component is used for forming a film by sputtering with reduced particles and nodules produced during the sputtering. The variation of quality is small and the mass-productivity is improved. The crystal particles are fine and the density is as high as 90% or more. An optical recording medium on which a phase change optical disk protective film containing zinc sulfide as a major component is formed by using the target and a method for manufacturing the target are also disclosed.