发明名称 |
Analyzing method for non-uniform-density sample and device and system thereof |
摘要 |
A novel non-uniform-density sample analyzing method capable of analyzing simply and highly accurately the distribution state of particle-like matter in a non-uniform-density sample such as a thin film and bulk element and a non-uniform-density sample analyzing device and a non-uniform-density sample analyzing system for implementing the method are provided; said method comprising the steps of calculating a simulated X-ray scattering curve under the same conditions as measuring conditions for an actually measured X-ray scattering curve by using a scattering function that simulates an X-ray scattering curve according to a fitting parameter indicating distribution state of particle-like matter, carrying out fitting between the simulated X-ray scattering curve and the actually measured X-ray scattering curve while changing the fitting parameter, and using, as the distribution state of particulate matters in the non-uniform-density sample, the value of the fitting parameter when the simulated X-ray scattering curve agrees with the actually measured X-ray scattering curve.
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申请公布号 |
US2003157559(A1) |
申请公布日期 |
2003.08.21 |
申请号 |
US20030240671 |
申请日期 |
2003.02.26 |
申请人 |
OMOTE KAZUHIKO;ULYANENKOV ALEXANDER;KAWAMURA SHIGERU |
发明人 |
OMOTE KAZUHIKO;ULYANENKOV ALEXANDER;KAWAMURA SHIGERU |
分类号 |
G01N23/20;(IPC1-7):G01N33/53 |
主分类号 |
G01N23/20 |
代理机构 |
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主权项 |
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地址 |
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