| 摘要 |
Contact layer system comprises three individual metal (alloy) layers arranged on a substrate. The first layer is made from gold or silver, or gold or silver alloy. The second layer is made from molybdenum, tungsten, tantalum, ruthenium, rhodium, rhenium, iridium, platinum or palladium, or a tungsten-ruthenium, tantalum-molybdenum, palladium-ruthenium or molybdenum-ruthenium alloy. The third layer is made from gold or silver, or gold or silver alloy. A first transition region is arranged between the first layer and the second layer, and a second transition region is arranged between the second layer and the third layer. The concentration of the first metal (alloy) in the first transition region decreases continuously or in steps in the direction of the second layer whilst the concentration of the second metal (alloy) increases in the opposite direction. The concentration of the second metal (alloy) in the second transition region decreases continuously or in steps in the direction of the second layer whilst the concentration of the third metal (alloy) increases in the opposite direction. An Independent claim is also included for a process for the production of the contact layer system. Preferred Features: The third metal alloy is made from gold and nickel, or gold and silver, or gold and palladium or gold and cobalt. The substrate is made from CuNi30Fe, PdAg40 or AgNi20. The contact layer system is 6-8 microns thick. The individual layers are applied by CVD.
|
