| 摘要 |
An anomaly detection system that can detect physical-positional anomalies or probably abnormal symptoms in a product on a wafer even if an inspector passively monitors map data or anomalies in a unit of test such as a lot of products do not reach a predetermined anomaly reference value. An input module 32 of an anomaly detection system 30 inputs positional data 15 about the position of each of a plurality of semiconductor product on a wafer from a wafer prober and inputs a predetermined test result data 25 about the semiconductor product from an LSI tester 20 each time a test on the plurality of semiconductor products. A detector 33 detects a predetermined abnormal value pattern in a plurality of semiconductor products having a predetermined abnormal value in the predetermined test result data 25 inputted by the input module 32. An output section 34 outputs detection result data 35 (an alarm if the abnormal pattern is detected).
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