| 摘要 |
PURPOSE: A transfer machine for an in-line sputtering system is provided to be capable of improving the efficiency and reliability of the system by waiting substrates for being sequentially and stably transferred to the following process. CONSTITUTION: A transfer machine is provided with the first chamber body(10) having a transfer chamber(12), the second chamber body(20) capable of switching the transfer chamber of the first chamber body, a transfer part(30) for moving the second chamber body to and fro, a heating part(40) installed in the first and second chamber body for heating the transfer chamber, a gate plate having a port connected through the transfer chamber, installed at both sidewalls of the first chamber body, a switching part capable of switching the port of the gate plate, and a vacuum pump(100) for conserving vacuum state in the transfer chamber.
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