TUNABLE BULK ACOUSTIC WAVE MEMS MICRORESONATOR

摘要

The invention relates to a suspended bulk acoustic wave microresonator comprising a beam which is made from a piezoelectric material (1). Said beam is solidly connected to a support (3) and is sandwiched between excitation electrodes (4, 5). The inventive resonator also comprises means of modifying the limiting conditions of the resonator, which is formed by the excited beam, in order to alter the resonance frequency of the microresonator.