WAFER CARRIER DOOR AND LATCHING MECHANISM WITH HOURGLASS SHAPED KEY SLOT

摘要

A door (114) for a wafer carrier (100) having a latching mechanism (160, 200) with rotatable actuating member (170). The rotatable actuating member is actuated from outside the wafer carrier using a key (220) inserted into a key slot (222) in the rotatable actuating member. The key slot is formed in an hourglass shape and comprised of an abrasion resistant material to reduce generation of particulate contaminants.