发明名称 ETCHING SOLUTION FOR FORMING AN EMBEDDED RESISTOR
摘要 <p>A resistive etching solution containing thiourea, which is particularly suitable for etching an electrically resistive material comprised of a nickel-chromium alloy. The resistive etching solution allows for fast and effective etching of a nickel chromium alloy in cases where the ratio of (a) copper surface area to (b) nickel/chromium surface area, is relatively large, and where fine feature etching is desired.</p>
申请公布号 WO2003069636(P1) 申请公布日期 2003.08.21
申请号 US2003003086 申请日期 2003.02.03
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