发明名称 |
Wafer for use in detecting DNA and proteins is divided into biosensors, the area around each sensor being sealed by sealing ring |
摘要 |
Wafer (1) is divided into biosensors (2). The area (3) around each sensor is sealed by a sealing ring (4). An Independent claim is included for a method for making a wafer with seals, as described above. |
申请公布号 |
DE10203212(A1) |
申请公布日期 |
2003.08.21 |
申请号 |
DE2002103212 |
申请日期 |
2002.01.28 |
申请人 |
SIEMENS AG |
发明人 |
ECKSTEIN, GERALD;GROEPPEL, PETER;WOSSLER, MANFRED |
分类号 |
B81B7/00;G01N33/48;H01L23/10;(IPC1-7):B81B7/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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