| 摘要 |
<p>An induction heating coil (21) provided with a gas injection opening communicating with the outside and a plurality of gas supply openings at specified positions of a gas channel (23) formed internally, wherein at least one gas supply opening is provided, in the inner circumferential surface thereof, with screw grooves (51, 52). The gas supply openings are opened in the side of a coil face constituting a planar induction electric field. A specific threaded member (55) is screwed into the screw grooves (51, 52).</p> |
