发明名称 IMPROVED SCANNING PROBE MICROSCOPE
摘要 <p>A scanning probe microscope uses two different scanners (also called 'scanning stages') that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called 'x-y scanner') scans a sample in a plane (also called 'x-y plane'), while the other scanner (called 'z scanner') scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called 'z direction') perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.</p>
申请公布号 WO2003069271(P1) 申请公布日期 2003.08.21
申请号 KR2002002222 申请日期 2002.11.27
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