| 摘要 |
FIELD: mechanical engineering, deposition of coats of refractory aluminum oxide on cutting tools. SUBSTANCE: process is related to tools which frame is made of carburized carbide, cermet, ceramics or high-speed steel that can find use in various branches of mechanical engineering. Coats are deposited with the aid of process of chemical precipitation from vapor phase activated by plasma. Plasma is generated thanks to application of bipolar pulsating DC voltage to two electrodes to which frames of substrates are attached and electrically connected. Owing to this accumulation of electric charge on nonconducting surfaces is prevented and therefore there will be no sparking over coat surface which makes it possible to execute long and stable deposition of coat, to obtain high-quality coat including either single phase gamma-Al2O3 or mixture of gamma- and gamma-Al2O3 phases. Coats are deposited at temperatures up to 500 C. EFFECT: deposition of high-quality coats. 8 cl, 8 dwg, 5 tbl
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