| 发明名称 |
METHOD AND ELECTRIC-FIELD GENERATOR/MODULATOR FOR PRODUCING ELECTRICITY CONDUCTING AND/OR SEMICONDUCTING THREE-DIMENSIONAL STRUCTURES AND METHOD FOR KILLING THESE STRUCTURES |
| 摘要 |
FIELD: microelectronics; production of thin-film electronic circuits. SUBSTANCE: methods are developed for producing electricity conducting and/or semiconducting two- or three-dimensional structures and for killing these structures. Electric-field generator/modulator is designed for use in method for producing mentioned structures. EFFECT: reduced cost of mass production of electrical connections for thin-film structures of electronic circuits. 15 cl, 12 dwg |
| 申请公布号 |
RU2210834(C2) |
申请公布日期 |
2003.08.20 |
| 申请号 |
RU20000122454 |
申请日期 |
1999.01.28 |
| 申请人 |
TIN FILM EHLEKTRONIKS ASA |
发明人 |
NORDAL' PER-EHRIK;LEJSTAD GEJRR I.;GUDESEN KHANS GUDE |
| 分类号 |
H01L21/3205;H01L21/02;H01L21/26;H01L21/336;H01L21/64;H01L21/768;H01L21/822;H01L21/8238;H01L23/52;H01L27/092;H01L29/06;H01L29/786;H01L29/861;H01L51/05;H01L51/40;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/3205 |
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