发明名称 CATADIOPTRIC SYSTEM AND EXPOSURE DEVICE HAVING THIS SYSTEM
摘要 A catadioptric system includes: a first image forming optical system that includes at least two reflecting mirrors and forms a first intermediate image of a first plane with light originating from the first plane; a second image forming optical system that includes at least two reflecting mirrors and forms a second intermediate image of the first plane with light having traveled via the first image forming optical system; and a refractive type of third image forming optical system that forms a final image of the first plane onto a second plane with light having traveled via the second image forming optical system, and optical members constituting the first image forming optical system, the second image forming optical system and the third image forming optical system are all disposed along a single linear optical axis. <IMAGE>
申请公布号 EP1336887(A1) 申请公布日期 2003.08.20
申请号 EP20010976807 申请日期 2001.10.23
申请人 NIKON CORPORATION 发明人 TAKAHASHI, TOMOWAKI
分类号 G02B13/18;G02B13/22;G02B17/08;G03F7/20;G03F7/22;H01L21/027;(IPC1-7):G02B17/08 主分类号 G02B13/18
代理机构 代理人
主权项
地址