| 发明名称 |
METHOD OF MAKING LOW STRESS AND LOW RESISTANCE RHODIUM (RH) LEADS |
| 摘要 |
A method of making rhodium (Rh) lead layers for a read sensor comprises a first step of obliquely ion beam sputtering the rhodium (Rh) lead layer followed by a second step of annealing. This method results in rhodium (Rh) lead layers which have reduced stress and less resistance, making them highly desirable for lead layers of a sensor in a read head. |
| 申请公布号 |
SG97973(A1) |
申请公布日期 |
2003.08.20 |
| 申请号 |
SG20000006604 |
申请日期 |
2000.11.14 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MUSTAFA PINARBASI |
| 分类号 |
C23C14/46;G11B5/31;G11B5/39;(IPC1-7):G11B5/31;C23C14/34 |
主分类号 |
C23C14/46 |
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