发明名称 Electrostatic lens systems for secondary-electron mapping-projection apparatus, and mapping-projection apparatus and methods comprising same
摘要 Electron-optical systems are disclosed that are especially useful in mapping-projection electron microscopy and related uses. The systems achieve high magnification with excellent control of aberrations, and low magnification at wide optical fields with excellent control of aberrations.
申请公布号 US6608308(B1) 申请公布日期 2003.08.19
申请号 US20000580533 申请日期 2000.05.26
申请人 NIKON CORPORATION 发明人 TAKAGI TORU;NISHIMURA HIROSHI
分类号 G21K1/06;G21K7/00;H01J37/153;(IPC1-7):G21K7/00;G03C5/00 主分类号 G21K1/06
代理机构 代理人
主权项
地址