Fan filter unit control system and clean room provided with same

摘要

Information from fan filter units and differential pressure gauges provided in a ceiling of a clean room is used to control directions and volumes of air flows blown from respective fan filter units. In order to improve a wind velocity distribution in the clean room, pressure in a ceiling chamber is made uniform and control of the FFU revolution speeds of fan filter units is made easy. In order to control directions of air flows in the clean room, damper adjusting mechanisms are provided under a grating floor of the clean room. Such arrangement enables optimizing an operating condition of the clean room and achieving energy saving.