| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a carbon film coated member which has an excellent low wearability, wear characteristics and corrosion resistance and exhibits less release, dust generation and deterioration even when it is used under a severe condition and hardly exerts a bad influence on a semiconductor product and has an excellent durability. <P>SOLUTION: The carbon film coated member 1 in which a film 6 comprising a metal and/or a metal carbide 5 in a matrix comprising an amorphous carbon 4 is formed on at least a part of the surface of a base material, is characterized by an atomic ratio (M/C) of the metal (M) constituting the film to carbon (C) being in a range of 0.01-0.7. <P>COPYRIGHT: (C)2003,JPO</p> |
