发明名称 |
Method for fabricating tiny field emitter tips |
摘要 |
A method for fabricating tiny field emitter tips across the surface of a substrate. A substrate is first exposed to reactive molecular, ionic, or free radical species to produce nanoclusters within a thin surface layer of the substrate. The substrate may then be thermally annealed to produce regularly sized and interspaced nanoclusters. Finally, the substrate is etched to produce the field emitter tips.
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申请公布号 |
US6607415(B2) |
申请公布日期 |
2003.08.19 |
申请号 |
US20010880158 |
申请日期 |
2001.06.12 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
DUNFIELD JOHN STEPHEN;MILLIGAN DONALD J.;MCCLELLAND PAUL H. |
分类号 |
B82B3/00;H01J1/304;H01J9/02;(IPC1-7):H01J1/304 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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