| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device controller allowing a beam operation by a beam transfer mechanism of the transfer device to infinitely get close to an ideal curve and reducing time lag or displacement in an arrival point due to delay in the beam operation, to safely ensure high productivity with high accuracy. SOLUTION: In this transfer device, a control circuit 40 sends a pulse signal to a servo actuator 45 and moves sliders 13, 23, controlling beams 3, 3 so as to open/close, elevate and move by using mobile mechanisms 1, 2. This control circuit 40 calculates the ideal curve for the displacement position of the beam, splits a pulse command signal from an actual stroke by displacement pickup into a pulse frequency depending on the scale of beam displacement rate, and provides a timing control correction for each pulse command timing to allow the beam operating curve to infinitely get close to the ideal curve. COPYRIGHT: (C)2003,JPO
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