| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam processing apparatus whose constitution is simple, cost is low and processing efficiency and processing accuracy can be improved. <P>SOLUTION: The laser beam processing apparatus comprises a mirror 2, an aperture 3, a beam size magnifying optical system 5, two acousto-optic elements 8, 9, a beam size reduction optical system 10, a mirror 15, a scanner 13 for rotating a mirror 18, a scanner 16 and an fθlens 19 disposed on an optical path of a laser oscillator 1. Deflecting directions of the element 8 and the scanner 13 are the same as those of the element 9 and the scanner 16. When a processing position is within the deflecting angle of the elements 8, 9, the laser beam can be deflected by operating the elements 8, 9 in a state that the mirrors 15, 18 are stopped. <P>COPYRIGHT: (C)2003,JPO</p> |
