TOOL FOR CORRECTING WAFER TRANSFER APPARATUS

摘要

PURPOSE: A tool for correcting a wafer transfer apparatus is provided to be capable of exactly aligning corresponding positions between a plurality of wafers loaded on a cassette and slots of the wafer transfer apparatus by using the first and second correcting part. CONSTITUTION: A tool is provided with the first correcting part(100) installed and inserted at the first and second slots for aligning each corresponding position between the first slots of a wafer transfer part and the second slots of a cassette, and the second correcting part(110) installed and inserted at the second and third slots for aligning each corresponding position between the second slots of the cassette and the third slots of a pusher.