| 发明名称 |
COATING APPARATUS AND COATING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method capable of simplifying the leveling process of a substrate. <P>SOLUTION: The coating apparatus comprises a coating part for applying a plurality of liquids with viscosities different from one another to a substrate and a control part for controlling the coating part corresponding to the arrangement of steps. The steps of the substrate can be solved by applying a plurality of the liquids with viscosities different from one another corresponding to the arrangement of the steps. <P>COPYRIGHT: (C)2003,JPO |
| 申请公布号 |
JP2003230860(A) |
申请公布日期 |
2003.08.19 |
| 申请号 |
JP20020030829 |
申请日期 |
2002.02.07 |
| 申请人 |
TOKYO ELECTRON LTD |
发明人 |
TEI MOTOICHI;TANAKA MICHIO |
| 分类号 |
G03F7/16;B05C5/02;B05C9/14;B05C11/00;B05D1/26;B05D5/12;B05D7/00;H01L21/00;H01L21/027;H01L21/288;H01L21/768 |
主分类号 |
G03F7/16 |
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