发明名称 SUBSTRATE, ITS MANUFACTURING PROCESS AND PHOTOELECTRIC CONVERTER USING THIS SUBSTRATE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a substrate having an optimum irregular shape for exerting a light-trapping effect in order to increase the amount of light incident on a photoelectric conversion layer of a solar cell and possessing a transparent conductive film with little absorption of visible light within the short wavelength, and to provide a photoelectric converter using this substrate. <P>SOLUTION: The substrate is equipped with a buffer layer with a film thickness of≤250 nm and a transparent conductive film in this order. The transparent conductive film is formed through thermal cracking using tin chloride as a raw material, wherein the absorption coefficient at a wavelength of 400-700 nm is≤1×10<SP>3</SP>cm<SP>-1</SP>, the maximum value of the absorption coefficient is at most 1.7 times as large as the minimum value, and the sheet resistance is≤15Ωper square. Between the substrate and the buffer layer, a ground layer comprising a first ground layer having a refractive index of 1.6-2.5 and a thickness of 5-100 nm and a second ground layer having a refractive index of 1.4-2.0 and a thickness of 5-100 nm, is formed. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003231968(A) 申请公布日期 2003.08.19
申请号 JP20020293096 申请日期 2002.10.04
申请人 NIPPON SHEET GLASS CO LTD 发明人 FUJISAWA AKIRA;SUEYOSHI YUKIO;HIRATA MASAHIRO;YAMAMOTO TORU;KIYOHARA KOICHIRO;ICHIKI KIYOTAKA
分类号 C23C16/40;C23C16/46;H01L31/04;(IPC1-7):C23C16/40 主分类号 C23C16/40
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