DIRECT PARTICLE BEAM INCLUDED FLUIDIZED POLISHING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a polishing system which can be controlled by generating vacuum and positive pressures for recovering and trapping materials ground by grinding particles colliding thereagainst. SOLUTION: In a manual contact device for the polishing system, a housing has first and second ends facing a polishing surface and an intake port and a plurality of discharge ports are disposed at one end of the housing for passage with a generation source for supplying air. The discharge ports have a fixed interval therebetween different from that with the intake port and a housing cover has the first and second ends at which an opening part is located to contact hard polishing materials and the second end of the housing cover and a plurality of discharge ports are arranged on the straight line to the intake port surrounding the opening part of the housing cover and a pouring port. COPYRIGHT: (C)2003,JPO