DEVICE AND METHOD FOR MEASURING SURFACE

摘要

PURPOSE: A surface measuring device and a method thereof are provided to measure parallel on both sides of a sample and the surface simultaneously and simply, and to arrange the optical system easily by irradiating parallel light on both surfaces of the sample and interfering with reflected light. CONSTITUTION: A surface measuring device comprises a light source(11) generating the same wavelength light; an optical unit converting light into a parallel ray; an irradiation and interference unit dividing parallel rays into two paths and irradiating to both sides of a sample(16), and interfering by focusing reflected rays opposite to the parallel rays through two paths; and a display unit(17) displaying interference rays from reflected rays for observation. The parallel on both sides of the sample and relative surfaces are measured conveniently at the same time.