SPIN PROCESSING DEVICE AND METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a spin processing device capable of detecting the slanted state of a substrate retained on a turn table. SOLUTION: The spin processing device for processing the substrate W while turning the same is provided with a turn table 3 driven to be turned, a plurality of supporting members 4 provided on the turn table to retain the peripheral part of the substrate supplied to the turn table, and a detecting means 35 for detecting the retaining state of the substrate retained by the supporting members. COPYRIGHT: (C)2003,JPO