摘要 |
PROBLEM TO BE SOLVED: To form a substantially uniform organic layer on a structure. SOLUTION: A thermophysical evaporation source, evaporating solid organic material when forming an organic light emitting device (OLED) on the structure comprises a bias heater, an electrically insulated container arranged inside the bias heater, and an evaporation heater arranged inside the container. The substantially uniform organic layer can be formed on the structure by making the structure relatively move against the evaporation source. COPYRIGHT: (C)2003,JPO
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